Fabrication of Silicon Carbide Nanostructures and Related Devices

Fabrication of Silicon Carbide Nanostructures and Related Devices

M. Bosi, K. Rogdakis, K. Zekentes

SiC nanostructures combine the physical properties of bulk SiC with that induced by the reduction of their spatial dimensionality and thus can be considered as a new material offering concrete advantages for various applications. The main effort on SiC nanocrystals (0D) is dedicated towards light emission and reinforcing agent applications. A large variety of methods were employed for SiC nanocrystal fabrication. SiC nanowires (1D) have been investigated for various applications (reinforcing agent, various types of sensors, transistors, field emitters). Both bottom and top down approaches have been used with concrete advantages and disadvantages for each approach. The fabrication methods of SiC nanocrystals and nanowires are described in a comprehensive way. The main effort has been dedicated for both structures on cubic polytype material as it is the more stable at low growth (< 1900 ºC) temperature. Applications and device technology are also included in the present review. Keywords
Nanocrystal, Nanowire, Nanotube, Nanopillar, NanoFET, Catalyst, Bottom Up Process, Core/Shell Heterostructure, Luminescence, Photoluminescence, Nanoelectromechanical Systems (NEMS), NWFET

Published online 2/15/2020, 43 pages

Citation: M. Bosi, K. Rogdakis, K. Zekentes, Fabrication of Silicon Carbide Nanostructures and Related Devices, Materials Research Foundations, Vol. 69, pp 233-275, 2020

DOI: https://doi.org/10.21741/9781644900673-5

Part of the book on Advancing Silicon Carbide Electronics Technology II

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