Atomic force microscopy analyses on metallic thin films for optical MEMS

V.V. MERIE; M.S. PUSTAN; G. NEGREA; C. BÎRLEANU

doi:10.21741/9781945291999-14

Atomic force microscopy analyses on metallic thin films for optical MEMS

Violeta Valentina MERIE, Marius Sorin PUSTAN, Gavril NEGREA, Corina BÎRLEANU

Abstract. This paper is a study on three metallic thin films usable for manufacturing optical MEMS. The films were deposited by thermal evaporation on glass substrates. They were characterized from the topographical, tribological and mechanical point of view at nanoscale. The results pointed out that the silver thin films present higher values of the tribological and mechanical properties than the other two films when testing at room temperature. Increasing the testing temperature from 20 to 100 °C caused a decreased of both hardness and Young’s modulus with about 30 up to 55 %.

Keywords
Metallic films, Spectroscopy in point, Work of adhesion, Friction, Nanoindentation

Published online 11/5/2018, 9 pages
Copyright © 2018 by the author(s)
Published under license by Materials Research Forum LLC., Millersville PA, USA

Citation: Violeta Valentina MERIE, Marius Sorin PUSTAN, Gavril NEGREA, Corina BÎRLEANU, ‘Atomic force microscopy analyses on metallic thin films for optical MEMS’, Materials Research Proceedings, Vol. 8, pp 125-133, 2018

DOI: https://dx.doi.org/10.21741/9781945291999-14

The article was published as article 14 of the book Powder Metallurgy and Advanced Materials

Content from this work may be used under the terms of the Creative Commons Attribution 3.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.

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