Application of Laser Interferometers in Form Deviation Measurements
Krzysztof STĘPIEŃ, Uros ZUPERL, Lenka CEPOVA, Michal HATALA, Gunther POSZVEK
Abstract. Nowadays, interferometry is very widely used in many areas of science and technology. In metrology of geometrical quantities, interferometers are primarily used in length measurements (e.g. of gauge blocks). Interferometers are also widely used in the diagnostics of machine tools and coordinate measuring machines. However, once the optics are properly configured, interferometers can also measure form deviations. The paper presents the use of a single-beam laser interferometer for straightness measurement.
Keywords
Metrology, Measurement, Form Deviation, Laser Interferometer
Published online 1/25/2026, 6 pages
Copyright © 2026 by the author(s)
Published under license by Materials Research Forum LLC., Millersville PA, USA
Citation: Krzysztof STĘPIEŃ, Uros ZUPERL, Lenka CEPOVA, Michal HATALA, Gunther POSZVEK, Application of Laser Interferometers in Form Deviation Measurements, Materials Research Proceedings, Vol. 62, pp 151-156, 2026
DOI: https://doi.org/10.21741/9781644904015-19
The article was published as article 19 of the book Terotechnology XIV
Content from this work may be used under the terms of the Creative Commons Attribution 3.0 license. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.
References
[1] K. Patorski, Kujawińska M., Sałbut L., Interferometria laserowa z automatyczną analizą obrazu, Wydawnictwo Politechniki Warszawskiej, Warszawa, 2005.
[2] M. Bielenin, Laser system for accurate spatial measurements, PhD Thesis, Wrocław University of Technology, Wrocław 2009.
[3] T. Tadej, B. Acko, Integration of a laser interferometer and a CMM into a measure-ment system for measuring internal dimensions, Measurement 44 (2011) 426-433. https://doi.org/10.1016/j.measurement.2010.11.002
[4] S. Topcu et al., Improving the accuracy of homodyne Michelson interferometers using polarization state measurement techniques, Optics Communications 247 (2005) 133-139. https://doi.org/10.1016/j.optcom.2004.11.040
[5] S. Chatterjee et al., Measurement of surface figure of plane optical surfaces with polarization phase-shifting Fizeau interferometer, Optics & Laser Technology 39 (2007) 268-274. https://doi.org/10.1016/j.optlastec.2005.08.006
[6] S. Chatterjee, Measurement of surface figure of plane optical surfaces using Fizeau interferometer with wedge phase-shifter, Optics & Laser Technology 37 (2005) 43-49. https://doi.org/10.1016/j.optlastec.2004.02.009
[7] T. Nomura et al., On-machine shape measurement of workpiece surface with Fizeau interferometer, Precision Engineering 14 (1992) 155-159. https://doi.org/10.1016/0141-6359(92)90004-G
[8] A. Yamamoto, I. Yamaguchi, Surface profilometry by wavelength scanning Fizeau interferometer, Optics & Laser Technology 32 (2000) 261-266. https://doi.org/10.1016/S0030-3992(00)00055-4
[9] L. Wang et al., Phase-shifting Jamin double-shearing interferometer based on polarization beam splitting film, Optik 124 (2013) 1215-1217. https://doi.org/10.1016/j.ijleo.2012.03.003
[10] Q. Yao et al., Simultaneous measurement of refractive index and temperature based on a core-offset Mach–Zehnder interferometer combined with a fiber Bragg grating, Sensors and Actuators A 209 (2014) 73-77. https://doi.org/10.1016/j.sna.2014.01.017
[11] L. Tan et al., Performance comparison of Fabry–Perót and Mach–Zehnder interferometers for molecular Doppler lidar based on fringe-imaging technique, Optik 125 (2014) 6291-6295. https://doi.org/10.1016/j.ijleo.2014.06.147
[12] Ch.-P. Chang et al., Fabry–Perót displacement interferometer for the measuring range up to 100 mm, Measurement 46 (2013) 4094-4099. https://doi.org/10.1016/j.measurement.2013.06.029
[13] M.G. Nikolić et al., Koester’s interferometer modification for gauge blocks calibration, Proc. SPIE 6604, 14th Int. School on Quantum Electronics: Laser Physics and Applications, 66040P (March 05, 2007). https://doi.org/10.1117/12.726899
