Influence of the Technology of Obtaining the Material of the Cathode of the Cu – Fe System at the Depth of Penetration of Ions into the Titanium Target

Influence of the Technology of Obtaining the Material of the Cathode of the Cu – Fe System at the Depth of Penetration of Ions into the Titanium Target

Viktor V. Ovchinnikov, Elena V. Luk’yanenko, Irina A. Kurbatova, Svetlana V. Yakutina, Nadezda V. Uchevatkina

Abstract. The article presents the results of the influence of the technology of obtaining the material of the cathode of the implanter of the Cu – Fe system on the penetration depth of the titanium alloy VT20. It is shown that the use of 50% Cu – 50% Fe material as the material of the cathode of the implanter, obtained by alloying copper and iron, leads to a better increase in the thickness of the ion-doped layer than the use of the cathode obtained by powder metallurgy.

Keywords
Titanium Alloys, Ion Implantation, Implanter Cathode, Penetration Depth, Cluster Ions

Published online 1/5/2022, 6 pages
Copyright © 2022 by the author(s)
Published under license by Materials Research Forum LLC., Millersville PA, USA

Citation: Viktor V. Ovchinnikov, Elena V. Luk’yanenko, Irina A. Kurbatova, Svetlana V. Yakutina, Nadezda V. Uchevatkina, Influence of the Technology of Obtaining the Material of the Cathode of the Cu – Fe System at the Depth of Penetration of Ions into the Titanium Target, Materials Research Proceedings, Vol. 21, pp 421-426, 2022

DOI: https://doi.org/10.21741/9781644901755-70

The article was published as article 70 of the book Modern Trends in Manufacturing Technologies and Equipment

Content from this work may be used under the terms of the Creative Commons Attribution 3.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.

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